Art

J-GLOBAL ID：200902272493594933   Reference number：05A0340951

Theoretical Investigation of Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films with Elliptical Cylindrical Pores

楕円円筒細孔をもつ二次元周期多孔質シリカ膜の誘電率及び弾性係数の理論的研究

Author (8)： MIYOSHI Hidenori (Assoc. of Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  MATSUO Hisanori (Assoc. of Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  TANAKA Hirofumi (Assoc. of Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  YAMADA Kazuhiro (Assoc. of Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  OKU Yoshiaki (Assoc. of Super-Advanced Electronics Technol. (ASET), Ibaraki, JPN) ,  TAKADA Syozo (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  HATA Nobuhiro (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KIKKAWA Takamaro (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 44  Issue： 3  Page： 1161-1165  Publication year： Mar. 15, 2005 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： dielectric thin film ,...
Semi thesaurus term： *silica ,...

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JST classification (3)： Oxide thin films  (BK14050P) ,  Dielectrics in general  (BM05010F) ,  Mechanical properties of solids in general  (BL01021C)

Reference (25)：

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• 4) S. Lin, C. Jin, L. Lui, M. Tsai, M. Daniels, A. Gonzalez, J. T. Wetzel, K. A. Monning, P. A. Winebarger, S. Jang, D. Yu and M. S. Liang: Proc. 2001 Int. Interconnect Technology Conf., San Francisco, 2001 (IEEE Press, New Jersey, 2001) p. 146.
• 5) H. Miyoshi, H. Matsuo, Y. Oku, H. Tanaka, K. Yamada, N. Mikami, S. Takada, N. Hata and T. Kikkawa: Jpn. J. Appl. Phys. 43 (2004) 498.

Terms in the title (9)： 楕円 ,  細孔 ,  周期 ,  多孔質 ,  シリカ膜 ,  誘電率 ,  弾性係数 ,  理論 ,  研究