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J-GLOBAL ID：200902273373987997   Reference number：05A0894714

Cross Comparison of Thin-Film Tensile-Testing Methods Examined Using Single-Crystal Silicon, Polysilicon, Nickel, and Titanium Films

単結晶シリコン,ポリシリコン,ニッケル,チタニウム膜を使って試験される薄膜引張試験法のクロス比較
Author (12)：
TSUCHIYA Toshiyuki

About TSUCHIYA Toshiyuki

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
HIRATA Masakazu

About HIRATA Masakazu

(Seiko Instruments, Inc., Matsudo, JPN)

About Seiko Instruments, Inc., Matsudo, JPN

, 
CHIBA Norio

About CHIBA Norio

(Seiko Instruments, Inc., Matsudo, JPN)

About Seiko Instruments, Inc., Matsudo, JPN

, 
UDO Ryujiro

About UDO Ryujiro

(Hitachi, Ltd., Tsuchiura, JPN)

About Hitachi, Ltd., Tsuchiura, JPN

, 
YOSHITOMI Yuji

About YOSHITOMI Yuji

(Hitachi, Ltd., Tsuchiura, JPN)

About Hitachi, Ltd., Tsuchiura, JPN

, 
ANDO Taeko

About ANDO Taeko

(Nagoya Univ., Nagoya, JPN)

About Nagoya Univ., Nagoya, JPN

, 
SATO Kazuo

About SATO Kazuo

(Nagoya Univ., Nagoya, JPN)

About Nagoya Univ., Nagoya, JPN

, 
TAKASHIMA Kazuki

About TAKASHIMA Kazuki

(Tokyo Inst. Technol., Yokohama, JPN)

About Tokyo Inst. Technol., Yokohama, JPN

, 
HIGO Yakichi

About HIGO Yakichi

(Tokyo Inst. Technol., Yokohama, JPN)

About Tokyo Inst. Technol., Yokohama, JPN

, 
SAOTOME Yasunori

About SAOTOME Yasunori

(Gunma Univ., Kiryu, JPN)

About Gunma Univ., Kiryu, JPN

, 
OGAWA Hirofumi

About OGAWA Hirofumi

(National Inst. Advanced Industrial Sci. and Technol. (AIST), Tsukuba, JPN)

About National Inst. Advanced Industrial Sci. and Technol. (AIST), Tsukuba, JPN

, 
OZAKI Koichi

About OZAKI Koichi

(National Inst. Advanced Industrial Sci. and Technol. (AIST), Tsukuba, JPN)

About National Inst. Advanced Industrial Sci. and Technol. (AIST), Tsukuba, JPN


Material：
Journal of Microelectromechanical Systems  (J Microelectromechanical Syst)

About Journal of Microelectromechanical Systems


Volume： 14  Issue： 5  Page： 1178-1186  Publication year： Oct. 2005 
JST Material Number： W0357A  ISSN： 1057-7157  CODEN： JMIYET  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*single crystal

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,...
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マイクロファクトリー

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Material testing 
(HB02020U)

About Material testing

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
単結晶シリコン

About 単結晶シリコン

, 
ポリシリコン

About ポリシリコン

, 
ニッケル

About ニッケル

, 
チタニウム膜

About チタニウム膜

, 
試験

About 試験

, 
薄膜

About 薄膜

, 
引張試験

About 引張試験


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