Young’s Module Control of the Micro Cantilever made by Micro-Stereolithography

MIWA M.; DOUOKA K.; YONEYAMA S.; TUCHITANI S.; KOSIHMOTO Y.; KANEKO R.

Art

J-GLOBAL ID：200902273860175167 Reference number：05A0488777

Young’s Module Control of the Micro Cantilever made by Micro-Stereolithography

微細立体リソグラフィーで作製した微小片持梁のYoung率制御

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Author (6)： , , , , ,
Material：
Volume： 5719 Page： 6-13 Publication year： 2005
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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