Art

J-GLOBAL ID：200902277767919607   Reference number：06A0896595

Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique

極端紫外光源用のレーザプラズマからのデブリ挙動のレーザイメージング法による測定

Author (5)： TANAKA Hiroki (Dep. of Electrical and Electronic Systems Engineering, Graduate School of Information Sci. and Electrical ...) ,  HASHIMOTO Yuki (Dep. of Electrical and Electronic Systems Engineering, Graduate School of Information Sci. and Electrical ...) ,  TAMARU Kouji (Dep. of Electrical and Electronic Systems Engineering, Graduate School of Information Sci. and Electrical ...) ,  TAKAHASHI Akihiko (Dep. of Electrical and Electronic Systems Engineering, Graduate School of Information Sci. and Electrical ...) ,  OKADA Tatsuo (Dep. of Electrical and Electronic Systems Engineering, Graduate School of Information Sci. and Electrical ...)
Material： Applied Physics Letters  (Appl Phys Lett)
Volume： 89  Issue： 18  Page： 181109-181109-3  Publication year： Oct. 30, 2006 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： vacuum ultraviolet radiation ,...

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JST classification (1)： Electromagnetic waves in plasma  (BJ02032F)

Terms in the title (6)： 極端紫外光源 ,  レーザプラズマ ,  デブリ ,  挙動 ,  レーザ ,  イメージング