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J-GLOBAL ID：200902279178597074   Reference number：07A0087645

Study on Structure Transformation of Si Wafer in Grinding Process

研削工程でのSiウエハにおける構造転移
Author (4)：
ZHOU Libo

About ZHOU Libo

(Ibaraki Univ., Hitachi, JPN)

About Ibaraki Univ., Hitachi, JPN

, 
YAMAGUCHI Makoto

About YAMAGUCHI Makoto

(JSPMI, Tokyo, JPN)

About JSPMI, Tokyo, JPN

, 
SHIMIZU Jun

About SHIMIZU Jun

(Ibaraki Univ., Hitachi, JPN)

About Ibaraki Univ., Hitachi, JPN

, 
EDA Hiroshi

About EDA Hiroshi

(Ibaraki Univ., Hitachi, JPN)

About Ibaraki Univ., Hitachi, JPN


Material：
Key Engineering Materials  (Key Eng Mater)

About Key Engineering Materials


Volume： 329  Page： 373-378  Publication year： 2006 
JST Material Number： D0744C  ISSN： 1013-9826  Document type： Article
Article type： 原著論文  Country of issue： Switzerland (CHE)  Language： ENGLISH (EN)
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*silicon

About silicon

,...
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Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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diamond wheel

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Structure of amorphous semiconductors 
(BK04030O)

About Structure of amorphous semiconductors

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
研削工程

About 研削工程

, 
Siウエハ

About Siウエハ

, 
構造転移

About 構造転移


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