Art

J-GLOBAL ID：200902279377404188   Reference number：07A0939051

Growth of dense single-walled carbon nanotubes in nano-sized silicon dioxide holes for future microelectronics

将来のマイクロエレクトロニクスのためのナノサイズの二酸化けい素穴内の緻密な単層カーボンナノチューブの成長

Author (9)： IWASAKI T. (School of Sci. and Engineering, Waseda Univ., Building 61-504, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555, JPN) ,  MORIKANE R. (School of Sci. and Engineering, Waseda Univ., Building 61-504, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555, JPN) ,  EDURA T. (Nanotechnology Foundry, Waseda Univ., Building 120-5, 513 Turumaki-cho, Shinjuku-ku, Tokyo 162-0041, JPN) ,  TOKUDA M. (Nanotechnology Foundry, Waseda Univ., Building 120-5, 513 Turumaki-cho, Shinjuku-ku, Tokyo 162-0041, JPN) ,  TSUTSUI K. (Nanotechnology Foundry, Waseda Univ., Building 120-5, 513 Turumaki-cho, Shinjuku-ku, Tokyo 162-0041, JPN) ,  WADA Y. (School of Sci. and Engineering, Waseda Univ., Building 61-504, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555, JPN) ,  WADA Y. (Nanotechnology Foundry, Waseda Univ., Building 120-5, 513 Turumaki-cho, Shinjuku-ku, Tokyo 162-0041, JPN) ,  KAWARADA H. (School of Sci. and Engineering, Waseda Univ., Building 61-504, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555, JPN) ,  KAWARADA H. (Nanotechnology Foundry, Waseda Univ., Building 120-5, 513 Turumaki-cho, Shinjuku-ku, Tokyo 162-0041, JPN)
Material： Carbon
Volume： 45  Issue： 12  Page： 2351-2355  Publication year： Oct. 2007 
JST Material Number： H0270B  ISSN： 0008-6223  CODEN： CRBNA  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *nanotube ,...
Semi thesaurus term： SWCNT

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JST classification (2)： Carbon and its compounds  (YB02060D) ,  Manufacturing of ceramics and ceramic whiteware  (YC03020V)

Terms in the title (5)： マイクロエレクトロニクス ,  ナノサイズ ,  二酸化けい素 ,  単層カーボンナノチューブ ,  成長