Art
J-GLOBAL ID：200902279407342662   Reference number：04A0649689

Thin Film Piezoelectrics for MEMS

MEMS素子用の薄膜型圧電体
Author (2)：
TROLIER-MCKINSTRY S

About TROLIER-MCKINSTRY S

(Penn State Univ.)

About Penn State Univ.

, 
MURALT P

About MURALT P

(Swiss Federal Inst. Technol., Lausanne, CHE)

About Swiss Federal Inst. Technol., Lausanne, CHE


Material：
Journal of Electroceramics  (J Electroceramics)

About Journal of Electroceramics


Volume： 12  Issue： 1/2  Page： 7-17  Publication year： Jan. 2004 
JST Material Number： W1123A  ISSN： 1385-3449  CODEN： JOELFJ  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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*piezoelectrics

About piezoelectrics

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
PZT

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Piezoelectricity,pyroelectricity,electret 
(BM05040M)

About Piezoelectricity,pyroelectricity,electret

,  Ceramic coating to nonmetallic materials 
(YC02040K)

About Ceramic coating to nonmetallic materials

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
MEMS

About MEMS

, 
薄膜

About 薄膜

, 
圧電体

About 圧電体


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