Art
J-GLOBAL ID：200902280797065654   Reference number：06A0377132

砥粒レス超音波研磨法によるCVDダイヤモンド膜の研磨技術の開発

Author (3)：
YOKOSAWA TSUYOSHI

About YOKOSAWA TSUYOSHI

(東京都産技研)

About 東京都産技研

, 
TAKAGI JUN'ICHIRO

About TAKAGI JUN'ICHIRO

(横浜国大 大学院)

About 横浜国大 大学院

, 
KATAOKA SEIJI

About KATAOKA SEIJI

(東京都中小企業振興公社)

About 東京都中小企業振興公社


Material：
型技術  (Die and Mould Technology)

About 型技術


Volume： 21  Issue： 7  Page： 055-058  Publication year： Jun. 01, 2006 
JST Material Number： X0147A  ISSN： 0912-5582  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*evaporated film

About evaporated film

,...
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Thesaurus term/Semi thesaurus term
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研磨痕

About 研磨痕

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Press working 
(WC04050H)

About Press working

,  Carbon and its compounds 
(YB02060D)

About Carbon and its compounds

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
砥粒

About 砥粒

, 
レス

About レス

, 
超音波

About 超音波

, 
研磨

About 研磨

, 
CVD

About CVD

, 
ダイヤモンド膜

About ダイヤモンド膜

, 
開発

About 開発


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