Ultra-Precision Float Polishing of Calcium Fluoride Single Crystals for Deep Ultra Violet Applications

NAMBA Y; OHNISHI N; YOSHIDA S; HARADA K; YOSHIDA K; MATSUO T

Art

J-GLOBAL ID：200902285941394600 Reference number：05A0061567

Ultra-Precision Float Polishing of Calcium Fluoride Single Crystals for Deep Ultra Violet Applications

ディープ紫外線用弗化カルシウム単結晶の高精度フロート研磨加工(04A060014の差替記事)

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=05A0061567&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=05A0061567&from=J-GLOBAL&jstjournalNo=E0026A") }}

Author (6)： , , , , ,
Material：
Volume： 53 Issue： 2 Page： 459-462 Publication year： 2004
JST Material Number： E0026A ISSN： 0007-8506 Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

,...

To see more with JDream III (charged). {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=05A0061567&from=J-GLOBAL&jstjournalNo=E0026A") }}

Grinding , Electron and ion microscopes

, , , , ,

Return to Previous Page