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J-GLOBAL ID:200902285951742011   Reference number:08A0032340

Cyclic Stress Measurement Method Using Grain Size of Grown Grains in Electrodeposited Copper Foil

電着銅薄膜に発生する成長粒子の結晶粒径に着目した繰返し応力測定法
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Volume: 73  Issue: 736  Page: 1417-1423  Publication year: Dec. 25, 2007 
JST Material Number: F0227B  ISSN: 0387-5008  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Metallic materials  ,  Nondestructive testing  ,  Metallic thin films 
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