Art
J-GLOBAL ID:200902286145091147   Reference number:04A0757503

Piezoelectric Composites of Fine PZT Rods Realized by LIGA Process

LIGA工程により実現したPZT微細ロッド圧電複合体
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Material:
Volume: 16  Issue:Page: 199-210  Publication year: 2004 
JST Material Number: L0338A  ISSN: 0914-4935  CODEN: SENMER  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Category name(code) classified by JST.
Acoustic transducer and other acoustic equipments  ,  Piezoelectric devices 
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