Art
J-GLOBAL ID：200902286349435945   Reference number：03A0506006

Diffusion barrier properties of nano-crystalline TiZrN films in Cu/Si contact systems

Cu/Si接触系におけるナノ結晶TiZrN膜の拡散障壁特性
Author (4)：
TAKEYAMA M B

About TAKEYAMA M B

(Kitami Inst. Technol., Kitami, JPN)

About Kitami Inst. Technol., Kitami, JPN

, 
ITOI T

About ITOI T

(Kitami Inst. Technol., Kitami, JPN)

About Kitami Inst. Technol., Kitami, JPN

, 
AOYAGI E

About AOYAGI E

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
NOYA A

About NOYA A

(Kitami Inst. Technol., Kitami, JPN)

About Kitami Inst. Technol., Kitami, JPN


Material：
Applied Surface Science  (Appl Surf Sci)

About Applied Surface Science


Volume： 216  Issue： 1/4  Page： 181-186  Publication year： Jun. 30, 2003 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*Copper

About Copper

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Diffusion in solids in general 
(BL06021L)

About Diffusion in solids in general

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
Cu

About Cu

, 
Si

About Si

, 
ナノ結晶

About ナノ結晶

, 
拡散障壁

About 拡散障壁


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