Art
J-GLOBAL ID：200902288039223614
Reference number：04A0843247
Electrical properties and microstructure of ternary Ge/Ti/Al ohmic contacts to p-type 4H-SiC
p型4H-SiCへの三元Ge/Ti/Al Ohm接触の電気特性と微細構造
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Author (3)：
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Material：
Volume：
96
Issue：
9
Page：
4976-4981
Publication year：
Nov. 01, 2004
JST Material Number：
C0266A
ISSN：
0021-8979
CODEN：
JAPIAU
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor-metal contacts
, Metallic thin films
Terms in the title (7)：
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