Art
J-GLOBAL ID:200902288039223614   Reference number:04A0843247

Electrical properties and microstructure of ternary Ge/Ti/Al ohmic contacts to p-type 4H-SiC

p型4H-SiCへの三元Ge/Ti/Al Ohm接触の電気特性と微細構造
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Material:
Volume: 96  Issue:Page: 4976-4981  Publication year: Nov. 01, 2004 
JST Material Number: C0266A  ISSN: 0021-8979  CODEN: JAPIAU  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Category name(code) classified by JST.
Semiconductor-metal contacts  ,  Metallic thin films 

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