Art
J-GLOBAL ID：200902288464685206   Reference number：09A0552296

Silicon oxidation by ozone

オゾンによるシリコン酸化
Author (4)：
FINK Christian K

About FINK Christian K

(Univ. Cambridge, Cambridge, GBR)

About Univ. Cambridge, Cambridge, GBR

, 
NAKAMURA Ken

About NAKAMURA Ken

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN

, 
ICHIMURA Shingo

About ICHIMURA Shingo

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN

, 
JENKINS Stephen J

About JENKINS Stephen J

(Univ. Cambridge, Cambridge, GBR)

About Univ. Cambridge, Cambridge, GBR


Material：
Journal of Physics. Condensed Matter  (J Phys Condens Matter)

About Journal of Physics. Condensed Matter


Volume： 21  Issue： 18  Page： 183001,1-19  Publication year： May. 06, 2009 
JST Material Number： B0914B  ISSN： 0953-8984  CODEN： JCOMEL  Document type： Article
Article type： 文献レビュー  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*Ozone

About Ozone

, 
*silicon

About silicon

, 
facet

About facet

, 
lattice distortion

About lattice distortion

, 
*silicon oxide

About silicon oxide

, 
hydride

About hydride

, 
growth rate

About growth rate

, 
*catalytic oxidation

About catalytic oxidation

, 
thin film growth

About thin film growth

, 
semiconductor material

About semiconductor material

, 
passive state film

About passive state film

, 
dielectric thin film

About dielectric thin film

, 
chemical equipment

About chemical equipment

, 
ozonizer

About ozonizer

, 
conversion coating film

About conversion coating film


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ozonizer

About ozonizer


JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxidation,reduction 
(CF02060T)

About Oxidation,reduction

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
オゾン

About オゾン

, 
シリコン

About シリコン

, 
酸化

About 酸化


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