Art
J-GLOBAL ID：200902288590183380   Reference number：04A0197165

Sample preparation techniques for physical analysis of VLSIs

VLSIの物理解析のためのサンプル調整法
Author (4)：
NAKAJIMA S

About NAKAJIMA S

(NTT Electronics Corp., Kanagawa, JPN)

About NTT Electronics Corp., Kanagawa, JPN

, 
NAKAMURA S

About NAKAMURA S

(NTT Electronics Corp., Kanagawa, JPN)

About NTT Electronics Corp., Kanagawa, JPN

, 
UEKI T

About UEKI T

(NTT Electronics Corp., Kanagawa, JPN)

About NTT Electronics Corp., Kanagawa, JPN

, 
SAKAI T

About SAKAI T

(NTT Electronics Corp., Kanagawa, JPN)

About NTT Electronics Corp., Kanagawa, JPN


Material：
Microelectronics Reliability  (Microelectronics and Reliability)

About Microelectronics Reliability


Volume： 44  Issue： 3  Page： 449-458  Publication year： Mar. 2004 
JST Material Number： C0530A  ISSN： 0026-2714  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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*VLSI

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

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Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
VLSI

About VLSI

, 
物理

About 物理

, 
解析

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, 
サンプル

About サンプル

, 
調整法

About 調整法


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