Structural change induced in TiO<sub>2</sub> by swift heavy ions and its application to three-dimensional lithography.

NOMURA K; NAKANISHI T; NAGASAWA Y; OHKI Y; AWAZU K; FUJIMAKI M; KOBAYASHI N; ISHII S; SHIMA K

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J-GLOBAL ID：200902289368478620 Reference number：03A0736371

Structural change induced in TiO₂ by swift heavy ions and its application to three-dimensional lithography.

高速重イオンにより起こしたTiO₂の構造変化とその3次元リソグラフィーへの応用

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Author (9)： , , , , , , , ,
Material：
Volume： 68 Issue： 6 Page： 064106.1-064106.8 Publication year： Aug. 2003
JST Material Number： D0746A ISSN： 1098-0121 CODEN： PRBMDO Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Irradiational changes of other materials

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Structural change induced in TiO2 by swift heavy ions and its application to three-dimensional lithography.

Structural change induced in TiO₂ by swift heavy ions and its application to three-dimensional lithography.