Art
J-GLOBAL ID：200902290629757147
Reference number：03A0351878
Nanometer Stepping Drives of Surface Acoustic Wave Motor
弾性表面波モータのナノメータステッピング駆動
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Author (3)：
,
,
Material：
Volume：
50
Issue：
4
Page：
376-385
Publication year：
Apr. 2003
JST Material Number：
H0369A
ISSN：
0885-3010
CODEN：
ITUCER
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Other applications of acoustics
, Motors
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