Art
J-GLOBAL ID：200902291997301150   Reference number：05A0747683

Plasma-enhanced chemical vapor deposition method to coat micropipettes with diamond-like carbon

マイクロピペットをダイヤモンド状炭素で被覆するためのプラズマ促進化学蒸着法
Author (5)：
KAKUTA Naoto

About KAKUTA Naoto

(Univ. Electro-Communications, Tokyo, JPN)

About Univ. Electro-Communications, Tokyo, JPN

, 
WATANABE Mayu

About WATANABE Mayu

(Univ. Electro-Communications, Tokyo, JPN)

About Univ. Electro-Communications, Tokyo, JPN

, 
YAMADA Yukio

About YAMADA Yukio

(Univ. Electro-Communications, Tokyo, JPN)

About Univ. Electro-Communications, Tokyo, JPN

, 
OKUYAMA Naoki

About OKUYAMA Naoki

(Univ. Electro-Communications, Tokyo, JPN)

About Univ. Electro-Communications, Tokyo, JPN

, 
MABUCHI Kunihiko

About MABUCHI Kunihiko

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN


Material：
Review of Scientific Instruments  (Rev Sci Instrum)

About Review of Scientific Instruments


Volume： 76  Issue： 7  Page： 075109.1-075109.5  Publication year： Jul. 2005 
JST Material Number： D0517A  ISSN： 0034-6748  CODEN： RSINAK  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*DLC film

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,...
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positive electrode

About positive electrode

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
マイクロピペット

About マイクロピペット

, 
ダイヤモンド状炭素

About ダイヤモンド状炭素

, 
プラズマ促進化学蒸着

About プラズマ促進化学蒸着


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