Art
J-GLOBAL ID：200902292060618472   Reference number：08A0569164

Photoconductivity of DLC film deposited by pulsed discharge plasma CVD

パルス放電プラズマCVD法で蒸着したDLC膜の光電導度
Author (4)：
KAWAI S.

About KAWAI S.

(DENSO CORP. Res. Laboratories, Komenoki, Nissin, Aichi 470-0111, JPN)

About DENSO CORP. Res. Laboratories, Komenoki, Nissin, Aichi 470-0111, JPN

, 
SHINAGAWA T.

About SHINAGAWA T.

(Dep. of Electronics and Information Engineering, Chubu Univ., Kasugai, Aichi 487-8501, JPN)

About Dep. of Electronics and Information Engineering, Chubu Univ., Kasugai, Aichi 487-8501, JPN

, 
NODA M.

About NODA M.

(Dep. of Electronics and Information Engineering, Chubu Univ., Kasugai, Aichi 487-8501, JPN)

About Dep. of Electronics and Information Engineering, Chubu Univ., Kasugai, Aichi 487-8501, JPN

, 
UMENO M.

About UMENO M.

(Dep. of Electronics and Information Engineering, Chubu Univ., Kasugai, Aichi 487-8501, JPN)

About Dep. of Electronics and Information Engineering, Chubu Univ., Kasugai, Aichi 487-8501, JPN


Material：
Diamond and Related Materials  (Diam Relat Mater)

About Diamond and Related Materials


Volume： 17  Issue： 4-5  Page： 676-679  Publication year： Apr. 2008 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*DLC film

About DLC film

, 
plasma CVD

About plasma CVD

, 
pulsed discharge

About pulsed discharge

, 
crystallinity

About crystallinity

, 
graphitization

About graphitization

, 
*photoconductivity

About photoconductivity

, 
photoelectric effect

About photoelectric effect

, 
concentration dependence

About concentration dependence

, 
molecular structure

About molecular structure

, 
alkane

About alkane


JST classification (2)：
JST classification
Category name(code) classified by JST.
Photodetectors 
(NC03083X)

About Photodetectors

,  Carbon and its compounds 
(YB02060D)

About Carbon and its compounds

Substance index (1)：
Substance index
Chemical Substance indexed to the Article.
Methane

About Methane

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
パルス放電

About パルス放電

, 
プラズマCVD法

About プラズマCVD法

, 
蒸着

About 蒸着

, 
DLC膜

About DLC膜

, 
光電導度

About 光電導度


Return to Previous Page

TOP

BOTTOM