Art
J-GLOBAL ID：200902292133116110
Reference number：06A0508974
Dependence of the electrical properties of the ZnO thin films grown by atomic layer epitaxy on the reactant feed sequence
反応剤供給順序への原子層エピタクシーにより成長させたZnO薄膜の電気特性の依存性
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Author (2)：
,
Material：
Volume：
24
Issue：
4
Page：
1031-1035
Publication year：
Jul. 2006
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films
, Electric conduction in crystalline semiconductors
Terms in the title (6)：
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