Art
J-GLOBAL ID：200902295524374813   Reference number：04A0692333

熱処理によるZnO薄膜中の結晶欠陥の変化

Author (3)：
KONO TAKUMI

About KONO TAKUMI

(高知工科大)

About 高知工科大

, 
NISHIDA KEN

About NISHIDA KEN

(高知工科大)

About 高知工科大

, 
KATODA TAKASHI

About KATODA TAKASHI

(高知工科大)

About 高知工科大


Material：
応用物理学会学術講演会講演予稿集  (Extended Abstracts. Annual Meeting. Japan Society of Applied Physics)

About 応用物理学会学術講演会講演予稿集


Volume： 65th  Issue： 2  Page： 547  Publication year： Sep. 01, 2004 
JST Material Number： Y0055A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*heat treatment

About heat treatment

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Lattice defects in semiconductors 
(BK12040Q)

About Lattice defects in semiconductors

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
熱処理

About 熱処理

, 
ZnO薄膜

About ZnO薄膜

, 
結晶欠陥

About 結晶欠陥


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