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J-GLOBAL ID：200902296634435423
Reference number：03A0465366
Surface nanostructuring of silicon
シリコン表面のナノ構造形成
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Author (3)：
,
,
Material：
Volume：
77
Issue：
2
Page：
277-284
Publication year：
Jul. 2003
JST Material Number：
D0256C
ISSN：
0947-8396
CODEN：
APHYCC
Document type：
Article
Article type：
原著論文
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages
, Surface structure of semiconductors
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