Art

J-GLOBAL ID：200902297572169876   Reference number：06A1016102

Secondary Ion Mass Spectrometry of Organic Thin Films Using Metal-Cluster-Complex Ion Source

金属クラスタ錯イオン源を用いた有機薄膜の二次イオン質量分析

Author (9)： FUJIWARA Yukio (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KONDOU Kouji (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  NONAKA Hidehiko (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  SAITO Naoaki (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  ITOH Hiroshi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  FUJIMOTO Toshiyuki (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KUROKAWA Akira (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  ICHIMURA Shingo (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  TOMITA Mitsuhiro (Toshiba Corp., Yokohama, JPN)
Material： Japanese Journal of Applied Physics. Part 2. Letters  (Japanese Journal of Applied Physics. Part 2. Letters & Express Letters)
Volume： 45  Issue： 33-36  Page： L987-L990  Publication year： Sep. 25, 2006 
JST Material Number： F0599B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： organic material ,...
Semi thesaurus term： PMMA ,...

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JST classification (2)： Thin films of organic compounds  (BK14070L) ,  Mass spectrometry  (CC03013N)

Terms in the title (4)： 金属クラスタ ,  錯イオン ,  有機薄膜 ,  二次イオン質量分析