Art
J-GLOBAL ID：200902297624997373
Reference number：04A0357214
Study of thermal oxidation of LaSix/Si(100) by grazing incidence electron-induced X-ray emission spectroscopy
すれすれ入射電子誘起X線放射分光によるLaSix/Si(100)の熱酸化の研究
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Author (2)：
,
Material：
Volume：
135
Issue：
1
Page：
47-52
Publication year：
Mar. 2004
JST Material Number：
D0266C
ISSN：
0368-2048
Document type：
Article
Article type：
原著論文
Country of issue：
Netherlands (NLD)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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JST classification (2)：
JST classification
Category name(code) classified by JST.
X-ray spectra in general.Including X-ray
, Oxide thin films
Terms in the title (8)：
Terms in the title
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