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J-GLOBAL ID：200902298792763651   Reference number：06A0289021

Surface Modification of Densified Silica Glass by CO Laser Irradiation

COレーザ照射による強化シリカガラスの表面改質

Author (3)： KITAMURA Naoyuki (National Inst. of Advanced Industrial Sci. and Technol., Osaka, JPN) ,  FUKUMI Kohei (National Inst. of Advanced Industrial Sci. and Technol., Osaka, JPN) ,  NISHII Junji (National Inst. of Advanced Industrial Sci. and Technol., Osaka, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 45  Issue： 3A  Page： 1725-1728  Publication year： Mar. 15, 2006 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *surface modification ,...
Semi thesaurus term： 微細バンプ

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JST classification (2)： Surface structure of solids in general  (BK15010E) ,  Laser irradiation effects and damages  (BK16040S)

Reference (14)：

• Y. Peng, C. An, M. Hong, Y. Lu and T. Chong: Jpn. J. Appl. Phys.42(2003)6920.
• J. Zhao, J. Sullivan and T. D. Bennet: Appl. Surf. Sci.225(2004)250.
• I. H. Chowdhury and X. Xu: Appl. Phys. Lett.86(2005)151110.
• S. Theppakuttai and S. Chen: Appl. Phys. Lett.83(2003)758.
• N. Kitamura, K. Fukumi, J. Nishii, T. Kinoshita and N. Ohno: Jpn. J. Appl. Phys.42(2003) L712.

Terms in the title (4)： COレーザ ,  強化 ,  シリカガラス ,  表面改質