Fabrication of ridge waveguides in LiNbO<sub>3</sub> thin film crystal by proton-exchange accelerated etching

TAKAOKA T.; FUJIMURA M.; SUHARA T.

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J-GLOBAL ID：200902299139814212 Reference number：09A0964388

Fabrication of ridge waveguides in LiNbO₃ thin film crystal by proton-exchange accelerated etching

プロトン交換加速エッチングによるLiNbO₃薄膜結晶におけるリッジ導波路の製作

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Author (3)： , ,
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Volume： 45 Issue： 18 Page： 940-941 Publication year： Aug. 27, 2009
JST Material Number： A0887A ISSN： 0013-5194 CODEN： ELLEAK Document type： Article
Article type：短報 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Fabrication of ridge waveguides in LiNbO3 thin film crystal by proton-exchange accelerated etching

Fabrication of ridge waveguides in LiNbO₃ thin film crystal by proton-exchange accelerated etching