Art

J-GLOBAL ID：200902299765309414   Reference number：05A0803530

Electrochemical etching using surface carboxylated graphite electrodes in ultrapure water

超純水中で表面カルボキシル化黒鉛電極を用いた電気化学エッチング

Author (6)： ICHII Yoshio (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamadaoka, Suita, Osaka ...) ,  MORI Yuzo (Res. Center for Ultraprecision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamadaoka, Suita ...) ,  HIROSE Kikuji (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamadaoka, Suita, Osaka ...) ,  ENDO Katsuyoshi (Res. Center for Ultraprecision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamadaoka, Suita ...) ,  YAMAUCHI Kazuto (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamadaoka, Suita, Osaka ...) ,  GOTO Hidekazu (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1, Yamadaoka, Suita, Osaka ...)
Material： Electrochimica Acta  (Electrochim Acta)
Volume： 50  Issue： 27  Page： 5379-5383  Publication year： Sep. 20, 2005 
JST Material Number： B0535B  ISSN： 0013-4686  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *electrolytic etching ,...
Semi thesaurus term： carboxylation

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JST classification (2)： Electrochemical reaction  (CB07050F) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (4)： 純水 ,  カルボキシル化 ,  黒鉛電極 ,  電気化学エッチング