photomask

設計および工業的操作・装置・部品
Synonyms (3)：

Related terms (7)：

pellicle (ペリクル【保護膜】)
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sub-resolution assist feature (サブ解像度補助パターン)
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mask pattern (マスクパターン)
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aerial image (空中像)
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mask error enhancement factor (マスク誤差増強因子)
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Narrower terms (11)：

x-ray mask (X線マスク)
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reticle (レチクル)
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metal mask (メタルマスク)
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etching mask (エッチングマスク)
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stencil mask (ステンシルマスク)
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