Term

J-GLOBAL ID：200906076946249656

sub-resolution assist feature

電子素子
Synonyms (2)：

sub-resolution assist pattern (サブレゾリューション支援パターン)
About sub-resolution assist pattern
- Search "sub-resolution assist pattern"
sub-resolution assistant structural skeleton (サブレゾリューション補助構造体)
About sub-resolution assistant structural skeleton
- Search "sub-resolution assistant structural skeleton"

Related terms (3)：

photomask (フォトマスク)
About photomask
- Search "photomask"
- Detailed information
photolithography (フォトリソグラフィー)
About photolithography
- Search "photolithography"
- Detailed information
resolving power (分解能)
About resolving power
- Search "resolving power"
- Detailed information

Broader terms (2)：

pattern formation (パターン形成)
About pattern formation
- Search "pattern formation"
- Detailed information
superresolution (超解像)
About superresolution
- Search "superresolution"
- Detailed information

Thsaurus map：

Thesaurus Map (Notice) Synonyms included only in Sciterm are not displayed

Return to Previous Page

TOP

BOTTOM