Term

J-GLOBAL ID：200906023707481338

CD uniformity

電子素子
Synonyms (2)：

critical dimension uniformity (クリティカルディメンジョン均一性)
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critical dimension uniformity (最小加工寸法均一性)
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Related terms (2)：

circuit pattern generation (回路パターン形成)
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fine patterning (微細加工)
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Broader terms (2)：

homogeneity (均一性)
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length (長さ)
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Thsaurus map：

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