Term

J-GLOBAL ID：200906055891877132

electron-beam-induced deposition

物質の構造
Synonyms (3)：

electron-beam-induced deposition (電子ビーム誘起堆積法)
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electron-beam-induced deposition (電子線誘起堆積)
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electron-beam-induced deposition (電子線誘起堆積法)
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Related terms (4)：

carbonyl complex (カルボニル錯体)
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Tungsten (タングステン)
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nanostructure (ナノ構造)
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- Detailed information
organoplatinum compound (有機白金化合物)
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- Detailed information

Broader terms (1)：

chemical vapor deposition (化学蒸着)
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- Detailed information

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