Term
J-GLOBAL ID:200906067733898066
hot-wall CVD
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Subject category
Subject category of the technical term.
物質の構造
Synonyms (3):
hot-wall chemical vapor deposition
(ホットウォール化学蒸着)
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hot-wall chemical vapor deposition
(ホットウォール化学気相蒸着)
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hot-wall chemical vapor deposition
(ホットウォール化学気相成長)
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Broader terms (1):
chemical vapor deposition
(化学蒸着)
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