Term
J-GLOBAL ID:200906074643333252 

ion beam sputtering

Subject category:
Subject category
Subject category of the technical term.
物質の構造
Sciterm (1):
Sciterm
Terms compiled by the various academic associations and the Ministry of Education, Culture, Sports, Science and Technology.
  • 植物学編(増訂版) / イオンスパッタ法 / ion spattering method
Synonyms (5):
Broader terms  (1):
Thsaurus map:
Thesaurus Map (Notice) Synonyms included only in Sciterm are not displayed

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