Term
J-GLOBAL ID：201106002508173650
electron beam lithography system
Subject category：
Subject category
Subject category of the technical term.
電子素子
Synonyms (2)：
電子露光装置
About 電子露光装置
Search "電子露光装置"
EB露光装置
About EB露光装置
Search "EB露光装置"
Related terms (1)：
electron beam lithography
(電子ビームリソグラフィー)
About electron beam lithography
Search "electron beam lithography"
Detailed information
Broader terms (1)：
equipment
(装置)
About equipment
Search "equipment"
Detailed information
Thsaurus map：
Thesaurus Map
(Notice) Synonyms included only in Sciterm are not displayed
Return to Previous Page
TOP
BOTTOM
