Observation of electron beam damage in thin-film SiO<sub>2</sub> on Si with scanning Auger electron microscope.

ICHIMURA S; SHIMIZU R

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J-GLOBAL ID：201002032896527136 Reference number：80A0060330

Observation of electron beam damage in thin-film SiO₂ on Si with scanning Auger electron microscope.

走査オージェ電子顕微鏡によるSi上のSiO₂薄膜の電子ビーム損傷の観察

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Volume： 50 Issue： 9 Page： 6020-6022 Publication year： 1979
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIA Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Observation of electron beam damage in thin-film SiO2 on Si with scanning Auger electron microscope.

Observation of electron beam damage in thin-film SiO₂ on Si with scanning Auger electron microscope.