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J-GLOBAL ID:201002035121507057   Reference number:77A0285538

The fundamentals of chemical vapour deposition.

化学蒸着の基礎
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Volume: 12  Issue:Page: 1285-1306  Publication year: 1977 
JST Material Number: B0722A  ISSN: 0022-2461  CODEN: JMTSA  Document type: Article
Article type: 文献レビュー  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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