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J-GLOBAL ID:201002078038389000   Reference number:80A0142530

Si単結晶のメカノケミカルポリシングにおける加工速度促進機構 メカノケミカルポリシングの研究 II

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Volume: 46  Issue:Page: 331-337  Publication year: 1980 
JST Material Number: F0268A  ISSN: 0374-3543  CODEN: SEKIA  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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