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J-GLOBAL ID：201002235705159831   Reference number：10A0107727

Microstructure and Properties of TiAlN/a-C Nanocomposite Coatings Prepared by Reactive Sputtering

反応性スパッタリングにより作製したTiAlN/a-Cナノ複合材料被膜の微細構造および性質

Author (7)： NOSE Masateru (Fac. of Art and Design, Univ. of Toyama) ,  KAWABATA Tokimasa (Graduate School of Sci. and Engineering for Res., Univ. of Toyama) ,  KHAMSEH Sara (Graduate School of Sci. and Engineering for Education, Univ. of Toyama) ,  MATSUDA Kenji (Graduate School of Sci. and Engineering for Res., Univ. of Toyama) ,  FUJII K. (Industrial Res. Inst. of Ishikawa) ,  IKENO Susumu (Graduate School of Sci. and Engineering for Res., Univ. of Toyama) ,  CHIOU Wen-an (NanoCenter, 1234 Kim Engineering Building, Univ. of Maryland)
Material： Materials Transactions  (Mater Trans)
Volume： 51  Issue： 2  Page： 282-287 (J-STAGE)  Publication year： 2010 
JST Material Number： G0668A  ISSN： 1345-9678  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *nitride ,  *titanium compound ,  *aluminum compound ,  carbon material ,  amorphous state ,  *Nanocomposites ,  substrate (plate) ,  silicon ,  high speed steel ,  *composite film ,  ceramic coating ,  *reactive sputtering ,  *micro structure ,  *mechanical property ,  hardness ,  nanoindentation ,  sputtered deposition ,  energy ,  filter ,  *amorphous carbon ,  *property
Semi thesaurus term： energy filter ,  *amorphous carbon

JST classification (2)： Ceramic coating to metallic materials  (YC02050V) ,  Properties of ceramics and ceramic whiteware  (YC03030G)

Reference (18)：

• VEPREK, S. Thin Solid Films. 1995, 268, 64-71
• JEHN, H. A. Surf. Coat. Technol. 2000, 131, 433-440
• ZEHNDER, T. Surf. Coat. Technol. 2000, 131, 433-440
• GALVAN, D. Acta Mater. 2005, 53, 3925-3934
• PEI, Y. T. Acta Mater. 2005, 53, 4505-4521

Terms in the title (7)： 反応性スパッタリング ,  作製 ,  TiAlN ,  ナノ複合材料 ,  被膜 ,  微細構造 ,  性質