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J-GLOBAL ID:201002275526729457   Reference number:10A1063553

最近の研究と技術 Delta型新球面収差補正装置

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Volume: 45  Issue:Page: 193-197  Publication year: Sep. 30, 2010 
JST Material Number: Y0541A  ISSN: 1349-0958  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Electron and ion microscopes 
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