Art

J-GLOBAL ID：201002287182928526   Reference number：10A0587290

Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films

共形,官能性,および応答性の高分子膜の化学蒸着

Author (13)： ALF Mahriah E. (Massachusetts Inst. of Technol., MA, USA) ,  ASATEKIN Ayse (Massachusetts Inst. of Technol., MA, USA) ,  BARR Miles C. (Massachusetts Inst. of Technol., MA, USA) ,  BAXAMUSA Salmaan H. (Massachusetts Inst. of Technol., MA, USA) ,  CHELAWAT Hitesh (Massachusetts Inst. of Technol., MA, USA) ,  OZAYDIN-INCE Gozde (Massachusetts Inst. of Technol., MA, USA) ,  PETRUCZOK Christy D. (Massachusetts Inst. of Technol., MA, USA) ,  SREENIVASAN Ramaswamy (Massachusetts Inst. of Technol., MA, USA) ,  TENHAEFF Wyatt E. (Massachusetts Inst. of Technol., MA, USA) ,  TRUJILLO Nathan J. (Massachusetts Inst. of Technol., MA, USA) ,  VADDIRAJU Sreeram (Massachusetts Inst. of Technol., MA, USA) ,  XU Jingjing (Massachusetts Inst. of Technol., MA, USA) ,  GLEASON Karen K. (Massachusetts Inst. of Technol., MA, USA)
Material： Advanced Materials  (Adv Mater (Deerfield, Fla.))
Volume： 22  Issue： 18  Page： 1993-2027  Publication year： May. 11, 2010 
JST Material Number： W0001A  ISSN： 0935-9648  CODEN： ADVMEW  Document type： Article
Article type： 文献レビュー  Country of issue： Germany, Federal Republic of (DEU)  Language： ENGLISH (EN)

Thesaurus term： *polymer membrane ,  *chemical vapor deposition ,  monomer ,  *functional polymer ,  chain propagation reaction ,  functionalization ,  surface energy ,  conductive property ,  hydrogel ,  piezoelectric material ,  interface(surface) ,  film thickness ,  concentration gradient ,  reaction mechanism ,  radical polymerization ,  interfacial polycondensation ,  adsorption ,  reaction rate ,  diffusion ,  reactivity ,  surface steps ,  chemical reactor ,  fine patterning ,  MEMS ,  pattern formation ,  medicine ,  surface modification ,  pore structure ,  composite film ,  fine particle
Semi thesaurus term： pH-sensitive polymer ,  air gap ,  micro particle ,  thermo-sensitive polymer ,  real-time control ,  biomedical field ,  adhesiveness ,  surface modification

JST classification (4)： Thin films of organic compounds  (BK14070L) ,  Solid-gos interface in general.  (CB12041H) ,  Other properties of polymer solids  (CG02025L) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (5)： 形 ,  官能性 ,  応答性 ,  高分子膜 ,  化学蒸着