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J-GLOBAL ID：201002299300956260   Reference number：10A0565071

Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum

真空中へのレーザアブレーションスズプラズマの構造及び膨張特性

Author (8)： ZHU Qiushi (Tokyo Inst. Technol., Yokohama, JPN) ,  YAMADA Junzaburo (Tokyo Inst. Technol., Yokohama, JPN) ,  KISHI Nozomu (Tokyo Inst. Technol., Yokohama, JPN) ,  HOSOKAI Tomonao (Tokyo Inst. Technol., Yokohama, JPN) ,  WATANABE Masato (Tokyo Inst. Technol., Yokohama, JPN) ,  OKINO Akitoshi (Tokyo Inst. Technol., Yokohama, JPN) ,  HORIOKA Kazuhiko (Tokyo Inst. Technol., Yokohama, JPN) ,  HOTTA Eiki (Tokyo Inst. Technol., Yokohama, JPN)
Material： Japanese Journal of Applied Physics  (JJAP)
Volume： 49  Issue： 5,Issue 1  Page： 056201.1-056201.6  Publication year： May. 25, 2010 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *plasma ,  *tin ,  *laser ablation ,  *internal structure ,  *expansion ,  Nd-YAG laser ,  velocity ,  Maxwell equation ,  plume ,  adiabatic expansion
Semi thesaurus term： flight time ,  イオン速度 ,  Knudsen cell ,  particle acceleration ,  two dimensional image

JST classification (2)： Solid-plasma interactions  (BJ02033W) ,  Laser irradiation effects and damages  (BK16040S)

Reference (23)：

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• V. Bakshi: EUV Sources fdr Lithography (SPIE Press, Bellingham, WA, 2008) Chap. 1, p. 3.
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Terms in the title (1)： 膨張