Term

J-GLOBAL ID：201006021145359842

post exposure bake

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Synonyms (7)：

post exposure bake (露光後加熱)
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post exposure bake (露光後ベーキング)
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post-exposure baking (露光後ベーキング)
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post exposure bake (PEB【加熱】)
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PEB(baking) (PEB【加熱】)
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Related terms (3)：

photolithography (フォトリソグラフィー)
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- Search "photolithography"
- Detailed information
exposure (photography) (露光)
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- Search "exposure (photography)"
- Detailed information
pattern formation (パターン形成)
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- Search "pattern formation"
- Detailed information

Broader terms (1)：

heat treatment (熱処理)
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- Search "heat treatment"
- Detailed information

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