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J-GLOBAL ID:201102202868106770   Reference number:11A0492909

次世代表面弾性波デバイス製造に向けた微細加工技術に関する研究

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Material:
Issue: 21  Page: 21-23  Publication year: Dec. 2010 
JST Material Number: L5514A  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices  ,  Surface acoustic wave devices 
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