Art
J-GLOBAL ID：201102215932154516   Reference number：11A1518987

The effects of aluminum oxide layer on the morphologies of Al coatings prepared by reactive sputtering

反応性スパッタリングにより作成したAl被覆のモルフォロジーへの酸化アルミニウム層の影響
Author (4)：
JEONG Jae-In

About JEONG Jae-In

(Res. Inst. of Industrial Sci. & Technol., Gyoungbuk, KOR)

About Res. Inst. of Industrial Sci. & Technol., Gyoungbuk, KOR

, 
YANG Ji-Hoon

About YANG Ji-Hoon

(Res. Inst. of Industrial Sci. & Technol., Gyoungbuk, KOR)

About Res. Inst. of Industrial Sci. & Technol., Gyoungbuk, KOR

, 
JANG Seung-Hyun

About JANG Seung-Hyun

(Res. Inst. of Industrial Sci. & Technol., Gyoungbuk, KOR)

About Res. Inst. of Industrial Sci. & Technol., Gyoungbuk, KOR

, 
PARK Hye-Sun

About PARK Hye-Sun

(Res. Inst. of Industrial Sci. & Technol., Gyoungbuk, KOR)

About Res. Inst. of Industrial Sci. & Technol., Gyoungbuk, KOR


Material：
プラズマプロセシング研究会プロシーディングス(CD-ROM)  (プラズマプロセシング研究会(CD-ROM))

About プラズマプロセシング研究会プロシーディングス(CD-ROM)


Volume： 28th  Page： ROMBUNNO.CTP-193  Publication year： 2010 
JST Material Number： L4449B  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*aluminum oxide

About aluminum oxide

, 
oxide film

About oxide film

, 
*magnetron sputtering

About magnetron sputtering

, 
covering

About covering

, 
scanning electron microscope

About scanning electron microscope

, 
*morphology

About morphology

, 
X-ray diffraction

About X-ray diffraction

, 
hardness

About hardness

, 
adhesion(surface chemistry)

About adhesion(surface chemistry)

, 
*aluminum

About aluminum

, 
surface analysis

About surface analysis


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
reactive magnetron sputtering

About reactive magnetron sputtering


JST classification (1)：
JST classification
Category name(code) classified by JST.
Metallic thin films 
(BK14030T)

About Metallic thin films

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
反応性スパッタリング

About 反応性スパッタリング

, 
Al

About Al

, 
モルフォロジー

About モルフォロジー

, 
酸化アルミニウム層

About 酸化アルミニウム層


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