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J-GLOBAL ID:201102234664774179   Reference number:11A1586470

化学工学年鑑2011 6.反応工学 6.6 CVDプロセス

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Material:
Volume: 75  Issue: 10  Page: 650-651  Publication year: Oct. 05, 2011 
JST Material Number: F0099A  ISSN: 0375-9253  CODEN: KKGKA4  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Keywords indexed to the article.
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Chemical engineering in general  ,  Chemical reaction engineering,chemical kinetics 
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