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J-GLOBAL ID：201102276157091374   Reference number：11A1782045

Deposition of microcrystalline intrinsic silicon by EAE technique

EAE手法による微結晶粒真性シリコンの蒸着
Author (12)：
HRUNSKI D.

About HRUNSKI D.

(Leybold Optics GmbH, Alzenau, DEU)

About Leybold Optics GmbH, Alzenau, DEU

, 
MOOTZ F.

About MOOTZ F.

(Leybold Optics GmbH, Alzenau, DEU)

About Leybold Optics GmbH, Alzenau, DEU

, 
ZEUNER A.

About ZEUNER A.

(Leybold Optics GmbH, Alzenau, DEU)

About Leybold Optics GmbH, Alzenau, DEU

, 
JANSSEN A.

About JANSSEN A.

(Leybold Optics GmbH, Alzenau, DEU)

About Leybold Optics GmbH, Alzenau, DEU

, 
ROST H.

About ROST H.

(Leybold Optics GmbH, Alzenau, DEU)

About Leybold Optics GmbH, Alzenau, DEU

, 
BECKMANN R.

About BECKMANN R.

(Leybold Optics GmbH, Alzenau, DEU)

About Leybold Optics GmbH, Alzenau, DEU

, 
BINDER S.

About BINDER S.

(Leybold Optics GmbH, Alzenau, DEU)

About Leybold Optics GmbH, Alzenau, DEU

, 
SCHUENGEL E.

About SCHUENGEL E.

(Ruhr-Univ. Bochum, Bochum, DEU)

About Ruhr-Univ. Bochum, Bochum, DEU

, 
MOHR S.

About MOHR S.

(Ruhr-Univ. Bochum, Bochum, DEU)

About Ruhr-Univ. Bochum, Bochum, DEU

, 
LUGGENHOELSCHER D.

About LUGGENHOELSCHER D.

(Ruhr-Univ. Bochum, Bochum, DEU)

About Ruhr-Univ. Bochum, Bochum, DEU

, 
CZARNETZKI U.

About CZARNETZKI U.

(Ruhr-Univ. Bochum, Bochum, DEU)

About Ruhr-Univ. Bochum, Bochum, DEU

, 
GRABOSCH G.

About GRABOSCH G.

(Leybold Optics GmbH, Alzenau, DEU)

About Leybold Optics GmbH, Alzenau, DEU


Material：
Proceedings. International Symposium on Sputtering & Plasma Processes  (ISSP)

About Proceedings. International Symposium on Sputtering & Plasma Processes


Volume： 11th  Page： 238-243  Publication year： Jul. 06, 2011 
JST Material Number： L8264A  ISSN： 0917-2440  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
intrinsic semiconductor

About intrinsic semiconductor

, 
*silicon

About silicon

, 
crystal grain

About crystal grain

, 
microcrystal

About microcrystal

, 
plasma CVD

About plasma CVD

, 
semiconductor thin film

About semiconductor thin film

, 
solar cell

About solar cell

, 
evaporated film

About evaporated film


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*PECVD

About PECVD

, 
tandem solar cell

About tandem solar cell


JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
EAE

About EAE

, 
手法

About 手法

, 
微結晶

About 微結晶

, 
シリコン

About シリコン

, 
蒸着

About 蒸着


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