About KAMATA TOMOYUKI
About HIRONO SHIGERU
About エム・イー・エス・アフティ
About UMEMURA SHIGERU
About 材料の科学と工学
About electron cyclotron resonance heating
About sputtered deposition
About hydrogenation
About DLC film
About heat treatment
About hardness
About atomic force microscope
About scratch test
About heat resistance
About crystallinity
About ECR heating
About scratch test
About Thin films of other inorganic compounds
About スパッタ
About 結晶性
About カーボン薄膜
About 耐熱性