Optical and Electrical Properties of Al<sub>2</sub>O<sub>3</sub> Films Grown by Aerosol Deposition

UEMICHI Y.; TAKINO J.; NISHIKAWA K.; SATO Y.; YOSHIKADO S.

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J-GLOBAL ID：201202214891218580 Reference number：12A0927364

Optical and Electrical Properties of Al₂O₃ Films Grown by Aerosol Deposition

アエロゾル堆積法で成長させたAl₂O₃膜の光学および電気特性

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Material：
Volume： 48 Issue： 1 Page： 64-68 Publication year： 2012
JST Material Number： E0527A ISSN： 2510-1560 Document type： Article
Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Optical and Electrical Properties of Al2O3 Films Grown by Aerosol Deposition

Optical and Electrical Properties of Al₂O₃ Films Grown by Aerosol Deposition