Art

J-GLOBAL ID：201202216171521874   Reference number：12A1673489

Effects of Applied Heat and Stress on Structural Changes of DLC Film

DLC膜の構造変化に及ぼす加えた熱と応力の影響

Author (4)： TOKUTA Yuuki (Tokyo Univ. of Sci.) ,  KAWAGUCHI Masahiro (Tokyo Metropolitan Industrial Technol. Res. Inst.) ,  SHIMIZU Aya (Tokyo Metropolitan Industrial Technol. Res. Inst.) ,  SASAKI Shinya (Tokyo Univ. of Sci.)
Material： Tribology Online (Web)  (Tribol Online (Web))
Volume： 7  Issue： 3  Page： 119-126 (J-STAGE)  Publication year： 2012 
JST Material Number： U0046A  ISSN： 1881-2198  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *DLC film ,  gas release ,  heat treatment ,  radiation absorption analysis ,  Raman spectroscopy ,  covering ,  hydrogen ,  ion implantation ,  vapor deposition ,  *tribology ,  membrane structure ,  tensile stress ,  compressive stress ,  *heating ,  *stress field
Semi thesaurus term： ERD Analysis ,  plasma ion implantation ,  *structural change ,  hydrogen release

JST classification (3)： Lubrication in general  (QB02010S) ,  Carbon and its compounds  (YB02060D) ,  Mechanical properties of solids in general  (BL01021C)

Reference (24)：

• [1] Aisenberg, S. and Chabot R., “Ion-Beam Deposition of Thin Films of Diamondlike Carbon,” J. Appl. Phys., 42, 1971, 2953-2958.
• [2] Erdemir, A., “Genesis of Superlow Friction and Wear in Diamondlike Carbon Films,” Tribology International, 37, 2004, 1005-1012.
• [3] Grill, A., “Review of the Tribology of Diamond-Like Carbon,” Wear, 168, 1993, 143-153.
• [4] Vanhulsel, A., Velasco, F., Jacobs, R., Eersels, L., Havermans, D., Roberts, E. W., Sherrington, I., Anderson, M. J. and Gaillard, L., “DLC Solid Lubricant Coatings on Ball Bearings for Space Applications,” Tribology International, 40, 2007, 1186-1194.
• [5] Guo, C. T. and Chen P. C., “Amorphous Hydrogenated Carbon Coatings on IC Packaging Mold by ECR-CVD System,” Applied Surface Science, 253, 2007, 9191-9197.

Terms in the title (2)： DLC膜 ,  応力