Art
J-GLOBAL ID：200902286205530862   Reference number：07A0905658

Amorphous hydrogenated carbon coatings on IC packaging mold by ECR-CVD system

ECR-CVDシステムによるICパッケージングモールド上の非晶質水素化炭素被覆層
Author (2)：
GUO C.t.

About GUO C.t.

(Dep. of Networks and Communication, Diwan Coll. of Management, Taiwan, TWN)

About Dep. of Networks and Communication, Diwan Coll. of Management, Taiwan, TWN

, 
CHEN P.c.

About CHEN P.c.

(Dep. of Materials Sci. and Engineering, National Cheng Kung Univ., Taiwan & Universal Nano Tech. Co. Ltd., Taiwan, TWN)

About Dep. of Materials Sci. and Engineering, National Cheng Kung Univ., Taiwan & Universal Nano Tech. Co. Ltd., Taiwan, TWN


Material：
Applied Surface Science  (Appl Surf Sci)

About Applied Surface Science


Volume： 253  Issue： 23  Page： 9191-9197  Publication year： Sep. 30, 2007 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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electron cyclotron resonance plasma

About electron cyclotron resonance plasma

,...
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Thesaurus term/Semi thesaurus term
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*forming mold

About forming mold


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (8)：
Terms in the title
Keywords automatically extracted from the title.
CVD

About CVD

, 
IC

About IC

, 
パッケージング

About パッケージング

, 
モールド

About モールド

, 
非晶質

About 非晶質

, 
水素化

About 水素化

, 
炭素

About 炭素

, 
被覆層

About 被覆層


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